Kiel Nano, Surface and Interface Science (KiNSIS)

Prof. Dr.-Ing. Wolfgang Benecke

Fraunhoferstr. 1, R.N.N.
Phone: +49 4821 17-4210
Telefax: +49 4821 17-4250
wolfgang.benecke@isit.fraunhofer.de

Technology for Silicon Based Micro- and Nanosystems
Institute of Electrical and Information Engineering
Faculty of Engineering

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