Prof. Dr. Bernhard Wagner
Fraunhoferstrasse 1, R.N.N.
Phone:
+49 4821 17-4213
Telefax:
+49 4821 17-42 50
bernhard.wagner@isit.fhg.de
Materials and Processes for Nanosystem Technologies
Institute for Materials Science
Faculty of Engineering
Microelectronics and Microsystems Technology
Fraunhofer ISIT
