Kiel Nano, Surface and Interface Science (KiNSIS)

Microplasma arrays: Concept, configuration, characteristics and potential applications (Dr. Volker Schulz-von der Gathen, Bochum)

07.11.2017 ab 16:15

Leibnizstr. 13, Hans-Geiger-Hörsaal, 24118 Kiel


Microplasma arrays belong to the class of low temperature non-equilibrium atmospheric pressure plasma devices. They consist of huge numbers of about 100 micrometer size cavities regularly positioned on a common ground. These structures are usually generally manufactured applying microstructure techniques on silica wafers [1], but other configurations have been investigated recently. Being basically dielectric barrier discharges, the devices are typically driven by a single power supply at kHz frequencies at voltages of a few hundred volts. Due to the small dimensions strong fields exist in close contact with the surfaces that introduces new physical features. The geometric configuration results e.g. in unique features of discharge dynamics as ionization waves. A huge number of possible applications have been proposed over the last years [2]. The examples range from photonic applications as light generation and detection to large scale surface treatments or use as meta materials. In this talk we will give a basic description of the concepts of microplasma arrays, their operation and some application possibilities. Subsequently we will describe some of the physical features observed mainly by analysis of optical emission.

[1] J.G. Eden, S.-J. Park, and K.-S. Kim, „Arrays of non-equilibrium plasmas confined to microcavities: an emerging frontier in plasma science and its applications“ Plasma Sources Science and Technology, 2006, 15, S67-S73
[2] J.G. Eden, and S.-J. Park, „Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications“, Plasma Phys Control Fusion, 2005, 47, B83-B92

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